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ELECTRONICS & MICROELECTRONICS

Mechanical Micromechanical Measurement
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 Application 1 : CCD matrix area
Electronic Microelectronic Measurement 2

    Aims :

  • Non contact measurement of a CCD focal plane, performed through the protecting window,
  • Measurment of the flatness of the focal plane,
  • Characterisation of the shape, size and spacing of individual pixels.
Click on image to improve definition
Focal plane of a CCD matrix (false color Altitude image)
1 - Focal plane of a CCD matrix
(false color Altitude image)
2 - Lowpass-filtered version of image 1, showing the general shape of the focal plane (which should ideally be perfectly flat)
Measurement parameters
Measurement system :
MICROMESURE 2 Profilometer
Controller :
CHR 150 L
Optical pen :
CL1 MG 210
Sample :
Focal plane of a CCD matrix
Material :
SiC
Picture size :
1.1 mm x 1.1 mm
Measurement pitch :
10 µm x 20 µm