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Electronic Microelectronic Measurement

MECHANICS & MICROMECHANICS

 Optic Measurement
Exemple 1 Mecanique Micro-mecanique
 Application 2 : Micro Electro Mechanical Systems (MEMS)
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    Aims :

  • Non contact quality control of MEMS
  • Detection and characterization of defects
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MEMS microopography (false color Altitude image)
1 - MEMS microopography (false color Altitude image)
2 - MEMS microopography (false color 3D representation)

Measurement parameters
Measurement system :
MICROMESURE 2 Profilometer
Controller :
CHR 150 L
Optical pen :
CL1 MG 210
Sample :
MEMS
Material :
Silicium
Picture size :
1.1 mm x 1.1 mm
Measurement pitch :
1 µm x 1 µm