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Mechanical Micromechanical Measurement

OPTICS

 Avionic Space Measurement
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 Application 1 : Microlens array
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    Aims :

  • Non contact measurement of a microlens array,
  • Quality control of the shape, size and position of indivudal microlenses,
  • Control of the surface quality.
Click on image to improve definition
Microlens array (false color 3D representation)
A single microlens (false color Altitude image)
1 - Microlens array (false color 3D representation)
2 - A single microlens (false color Altitude image)
A single microlens (3D rendering showing the surface quality)
Measurement parameters
Measurement system :
MICROMESURE 2 Profilometer
Controller :
CHR 150 L
Optical pen :
CL2 MG 140
Sample :
Microlens array
Material :
Silicium
Picture size :
3.2 mm x 2.4 mm
Measurement pitch :
4 µm x 4 µm
3 - A single microlens
(3D rendering showing the surface quality)