STIL High resolution chromatic confocal point sensors for noncontact 3D metrology

As the inventor of the chromatic confocal imaging and of the confocal spectral interferometry principles, STIL proposes a large range of point sensors for non-contact distance and thickness measurements, meeting the requirements of the most demanding metrological applications:

Roughness

In-line control

Thickness

Autofocus

Microtopography

The sensors consist of 3 parts :

1 Controller,
2 Optical pen (measuring head),
3 Optical fiber.

Advantages:

High resolution, High Precision
Any type of sample (transparent/opaque, polished/rough),
All materials (metal, glass, semiconductor, plastic...),
No preparation of the sample required,
2 standard measuring modes: Distance and Thickness,
Large choice of optical pens,
Free software tools including SDK.

Accessories:

Point Sensor comprising a CCS Controller and a Modular Optical Pen

Controllers

The controller is the processsing unit of the sensor. It comprises the white light source, the optoelectronic detection and the signal processing. The same controller can be used with several optical pens.

Technologies:

The sensors use two proprietary technologies:

Chromatic confocal imaging
confocal spectral interferometry

Range of controllers:

The STIL-DUO controller New sensor including both Confocal Chromatic and Confocal Spectral Interferometric technologies. Maximum measurement frequency: 2000 points / sec
The CCS controllers Lightweight, compact and high performances controllers. Advandced functionalities for OEM integration. Several models are available with maximum measurement frequencies: from 2000 to 30000 points / sec.
The CHR controllers Tabletop controller, featuring a Local User Interface (display and keypad). Maximum measurement frequency: 1000 points / sec.

Optical Pens

The optical pen is the measuring head of the sensor, it is connected to the Controller by an Optical fiber. The different Optical Pens offer the choice of the measuring range and the resolution. Several Optical Pens can be associated to the same controller.

ILB+MG Optical Pens - For use with STIL-DUO controller. - Measuring range: up to 135 µm. - 0.5 nm resolution in Distance and Thickness modes. - Minimal measurable thickness: 0.4µm. - Modular: 5 different combinations of an interferometric lens (ILB) and a magnifier lens (MG).
CL+MG Optical Pens - For use with all controllers. - Wide choice of measuring ranges: from 100 µm to 27 mm. - Resolution in Distance mode: down to 2nm. - Minimal measurable thickness: down to 7 µm. - Modular: 26 possible combinations of a chromatic lens (CL) and a magnifier lens (MG).
OP Optical Pens - For use with all controllers. - Wide choice of measuring range (20µm to 24 mm). - Resolution in Distance mode: down to 2 nm. - Minimal measurable thickness: down to 12 µm.

Optical Fibers

Core diameter: 50 µm (standard) or 20 µm,
Length: up to 10 meters,
Sheath: standard or metallic.

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