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Measuring Modes

The main measuring mode for the CHR and CCS sensors is "Distance" mode for measuring the altitude of the sampled point. The sensor is controlled in this mode on a COFRAC (French Agency for Acreditation) certified calibration bench, and a certificate of control results is supplied with each optical pen.

The "Thickness" mode allows measuring the thickness of flat transparent samples. In this mode the refractive index of the sample must be known.


Measurement mode

Distance
("Confocal 1 surface")

Thickness
("Confocal 2 surfaces")

Optical principle

Chromatic-coded confocal imaging

Chromatic-coded confocal imaging

Compatible optical pens

all

all

Compatible controllers

all

all

Availability

standard

standard

Metrological test with certificate

yes

no

Parameters measured simultaneously

Intensity, Distance

Intensity1, Distance1, Intensity2, Distance2, Thickness

Applications

distance measurement
(microtopography, profilometry, roughness)
thickness measurement
from 7 µm *



* Minimum thickness measurement depends on the optical pen