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The main measuring mode for the CHR and CCS sensors is "Distance" mode for measuring the altitude of the sampled point.
The sensor is controlled in this mode on a COFRAC (French Agency for Acreditation) certified calibration bench, and a certificate of control results is supplied with each optical pen. The "Thickness" mode allows measuring the thickness of flat transparent samples. In this mode the refractive index of the sample must be known. |
| Measurement mode |
Distance ("Confocal 1 surface") |
Thickness ("Confocal 2 surfaces") |
|
| Optical principle |
Chromatic-coded confocal imaging |
Chromatic-coded confocal imaging |
|
| Compatible optical pens |
all |
all |
|
| Compatible controllers |
all |
all |
|
| Availability |
standard |
standard |
|
| Metrological test with certificate |
yes |
no |
|
| Parameters measured simultaneously |
Intensity, Distance |
Intensity1, Distance1, Intensity2, Distance2, Thickness |
|
| Applications |
distance measurement (microtopography, profilometry, roughness) |
thickness measurement from 7 µm * |