MPLS-S allows stand-alone 3D measurement without needs of external translation means.

Two models are available :

	MICROVIEW-F	WAVY-F
	Small Field Optical Head	Large field Optical Head
Field size (X x Y): Pitch (X x Y): Spot diameter: Z Measuring range: Z Resolution: Z Accuracy: Field scan duration:	1.8 mm x 1.8 mm 10 µm x 10 µm 4 µm 500 µm 0.125 µm 0.5 µm 130 ms	44.75 mm x 45.8 mm 250 µm x 200 µm 50 µm 2 mm 0.5 µm 2.5 µm 130 ms