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MPLS-S allows stand-alone 3D measurement without needs of external translation means.
Two models are available :
| MICROVIEW-F | WAVY-F | |
| Small Field Optical Head | Large field Optical Head | |
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Field size (X x Y): Pitch (X x Y): Spot diameter: Z Measuring range: Z Resolution: Z Accuracy: Field scan duration: |
1.8 mm x 1.8 mm 10 µm x 10 µm 4 µm 500 µm 0.125 µm 0.5 µm 130 ms |
44.75 mm x 45.8 mm 250 µm x 200 µm 50 µm 2 mm 0.5 µm 2.5 µm 130 ms |