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Field Sensor

Large Field Optical Head for MPLS 180
Flip Chip warpage measured with MPLS-180 (Single frame)

Chromatic Confocal Field Sensors are obtained by adding a scanning mirror inside the optical head of the MPLS 180 Line sensor.

Two models are available :

Small Field Optical Head Large Field Optical Head
Field size (X x Y) :
Pitch (X x Y) :
Spot diameter :
Z Measuring range :
Z Resolution :
Z Accuracy :
Field scan duration :
1.8 mm x 1.8 mm
10 µm x 10 µm
4 µm
500 µm
0.125 µm
0.5 µm
130 ms
44.75 mm x 45.8 mm
250 µm x 200 µm
50 µm
2 mm
0.5 µm
2.5 µm
130 ms