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Chromatic Confocal Field Sensors are obtained by adding a scanning mirror inside the optical head of the MPLS 180 Line sensor. Two models are available : |
| Small Field Optical Head | Large Field Optical Head | |
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Field size (X x Y) : Pitch (X x Y) : Spot diameter : Z Measuring range : Z Resolution : Z Accuracy : Field scan duration : |
1.8 mm x 1.8 mm 10 µm x 10 µm 4 µm 500 µm 0.125 µm 0.5 µm 130 ms |
44.75 mm x 45.8 mm 250 µm x 200 µm 50 µm 2 mm 0.5 µm 2.5 µm 130 ms |