|
-
A MICROSTEP unit, comprising motorized x,y,z stages, one or more CHR sensors equipped with different measuring tools,
one or more video cameras, and an optional automatic device for loading the desired measuring tool ("Tool loader"),
-
A Control unit, comprising a PC computer equipped with several specific PC-boards,
-
A data acquisition software, SurfaceMap (developed by STIL), which controls the system via a dedicated man-machine interface,
-
A post-processing software, SPIP (developed by IMAGEMET).
|
|